Patent · US Active

Iterative feedback tuning in a scanning probe microscope

US8250667B2 · kind B2 · utility

4Cited by

2References

10Claims

0Family size

Assignee

Nanofactory Instruments AB · SE

Inventors

Krister Svensson · Olofström, SE
Paul Bengtsson · Floda, SE
Simon J. Altenburg · Kiel, DE

Key dates

Filing date	Dec 1, 2008
Grant date	Aug 21, 2012
Priority date	—
Expiry date	Jul 30, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01Q30/04
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method, system, device, and software for automatically determining PI feedback parameters in a scanning probe microscopy application setup using an iterative feedback tuning process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.