Method for producing component for vacuum apparatus, resin coating forming apparatus and vacuum film forming system
US8252113B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2006 |
| Grant date | Aug 28, 2012 |
| Priority date | — |
| Expiry date | Aug 30, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D7/22
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The object of this invention is to provide a method for producing a component for vacuum apparatus and a resin coating forming apparatus capable of easily forming a resin coating on an internal flow path complex in shape.The resin coating forming apparatus (21) comprises a monomer vapor supplying unit (23), a vacuum pumping line (24) for transporting monomer vapor, a connection portion (24c) connectable with the internal flow path of a component (22A) provided on part of the vacuum pumping line (24), and a temperature adjusting unit (31) for depositing the monomer vapor onto the internal flow path of the component (22A) connected with the connection portion (24c) to form a resin coating. The above arrangement permits the formation of a uniform, high-coverage resin coating on the internal flow path of the component (22A) by merely exposing the internal flow path to monomer vapor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.