ULVAC, INC.
446Patents
379Active
446Granted
56Portfolio score
Filing activity: May 19, 1972 → Feb 17, 2023 · 192 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7510984B2 | Method of forming silicon nitride film and method of manufacturing semiconductor device | Electricity | 79 | Expired |
| US6280585A | Sputtering apparatus for filling pores of a circular substrate | Electricity | 56 | Expired |
| US7821767B2 | Electrostatic chuck device | Electricity | 51 | Expired |
| US8356575B2 | Ion source and plasma processing apparatus | Electricity | 43 | Active |
| US6768627B1 | Electrostatic chuck and processing apparatus for insulative substrate | Electricity | 40 | Expired |
| US7757632B2 | Waveform generator for microdeposition control system | Electricity | 40 | Active |
| US7449070B2 | Waveform generator for microdeposition control system | Electricity | 38 | Expired |
| US7081214B2 | Electroconductive metal paste and method for production thereof | Emerging Cross-Sectional Technologies | 32 | Expired |
| US6930316B2 | Ion implantation system and ion implantation method | Electricity | 30 | Expired |
| USD557156S1 | Mass spectrometer | General | 29 | Expired |
| US7628840B2 | Metal nano-particles and method for preparing the same, dispersion of metal nano-particles and method for preparing the same, and thin metallic wire and metal film and method for preparing these substances | Emerging Cross-Sectional Technologies | 28 | Expired |
| US7419904B2 | Method for forming barrier film and method for forming electrode film | Electricity | 26 | Active |
| US7815965B2 | Industrial microdeposition system including masking to reduce the impact of droplet alignment and droplet volume tolerances and errors | Electricity | 26 | Active |
| US7927472B2 | Optical film thickness controlling method, optical film thickness controlling apparatus, dielectric multilayer film manufacturing apparatus, and dielectric multilayer film manufactured using the same controlling apparatus or manufacturing apparatus | Physics | 25 | Active |
| US8764902B2 | Film-forming apparatus | Electricity | 25 | Active |
| US7611754B2 | Industrial microdeposition system including masking to reduce the impact of droplet alignment and droplet volume tolerances and errors | Electricity | 25 | Expired |
| US7887156B2 | Integral printhead assembly | Performing Operations; Transporting | 24 | Active |
| US7901026B2 | Drop analysis system | Performing Operations; Transporting | 19 | Active |
| US7763115B2 | Vacuum film-forming apparatus | Emerging Cross-Sectional Technologies | 19 | Active |
| US8119462B2 | Method for forming conductive film, thin-film transistor, panel with thin-film transistor, and method for manufacturing thin-film transistor | Electricity | 19 | Active |
| US7209339B2 | Electrostatic chuck for an electrically insulative substrate, and a method of using same | Electricity | 19 | Expired |
| US7033461B2 | Thin film forming apparatus and method | Chemistry; Metallurgy | 18 | Expired |
| US7338900B2 | Method for forming tungsten nitride film | Electricity | 17 | Expired |
| US6700370B2 | Apparatus for measuring the thickness of a thin film having eddy current coil sensor | Physics | 17 | Expired |
| US8384083B2 | Thin-film transistor having high adhesive strength between barrier film and drain electrode and source electrode films | Electricity | 15 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.