Fabrication of a memory with two self-aligned independent gates
US8252702B2 · kind B2 · utility
2Cited by
6References
12Claims
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Key dates
| Filing date | Apr 21, 2011 |
| Grant date | Aug 28, 2012 |
| Priority date | — |
| Expiry date | Apr 21, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/017
Abstract
A method for making a micro-electronic non-volatile memory device provided with transistors having gates placed side by side, the method comprising the steps of:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.