Patent · US Active

Supporting device for supporting vibration sensitive components

US8256735B2 · kind B2 · utility

3Cited by
4References
9Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJul 14, 2006
Grant dateSep 4, 2012
Priority date
Expiry dateMar 15, 2029

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/709
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

The invention is in particular a supporting device for relative supporting loads with respect to a base comprising a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.