Supporting device for supporting vibration sensitive components
US8256735B2 · kind B2 · utility
3Cited by
4References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 14, 2006 |
| Grant date | Sep 4, 2012 |
| Priority date | — |
| Expiry date | Mar 15, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The invention is in particular a supporting device for relative supporting loads with respect to a base comprising a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.