Substrate with feedthrough and method for producing the same
US8263491B2 · kind B2 · utility
1Cited by
6References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2007 |
| Grant date | Sep 11, 2012 |
| Priority date | — |
| Expiry date | Mar 14, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/30107
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate has at least one feedthrough with at least one channel from a first main surface of the substrate to a second main surface of the substrate. The at least one channel is closed off with a first material. The at least one closed-off channel is filled with an electrically conductive second material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.