Patent · US Active

Substrate with feedthrough and method for producing the same

US8263491B2 · kind B2 · utility

1Cited by
6References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 19, 2007
Grant dateSep 11, 2012
Priority date
Expiry dateMar 14, 2028

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/30107
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A substrate has at least one feedthrough with at least one channel from a first main surface of the substrate to a second main surface of the substrate. The at least one channel is closed off with a first material. The at least one closed-off channel is filled with an electrically conductive second material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.