Patent · US Active

Mass flow controller

US8265795B2 · kind B2 · utility

20Cited by
5References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 5, 2009
Grant dateSep 11, 2012
Priority date—
Expiry dateSep 4, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T137/0324
  • WIPO fieldControl
  • WIPO sectorInstruments

Abstract

To improve PI performance of a mass flow controller, the mass flow controller changes a proportional coefficient, an integral coefficient, and a derivative coefficient used for PID operation in a stable state based on at least two out of a primary pressure, a time change amount of the primary pressure, and a flow rate set value.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.