Patent · US Active

Method and apparatus for forming a thin lamina

US8268645B2 · kind B2 · utility

17Cited by

15References

26Claims

0Family size

Assignee

Twin Creeks Technologies, Inc. · US

Inventors

Adam Kell · Orinda, US
Robert Clark-Phelps · Northborough, US
Joseph Gillespie · Boston, US
Gopal Prabhu · San Jose, US
Takao Sakase · Rowley, US
Theodore H. Smick · Essex, US
Steve Zuniga · Soquel, US
Steve Bababyan · Los Altos, US

Key dates

Filing date	Dec 20, 2011
Grant date	Sep 18, 2012
Priority date	—
Expiry date	Dec 20, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E10/50
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and heating the donor body to an implant temperature during implanting. The donor body is separably contacted with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body by applying a thermal profile to the donor body. Implantation and exfoliation conditions may be adjusted in order to maximize the defect-free area of the lamina.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.