Inventor · Northborough, MA, US

Robert Clark-Phelps

6Patents
3h-index
21Co-inventors
57Inventor score

Filing activity: Sep 4, 1999 → Sep 23, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7071051B1 Method for forming a thin, high quality buffer layer in a field effect transistor and related structure Electricity 531 Expired
US6293845A System and method for end-point detection in a multi-head CMP tool using real-time monitoring of motor current Performing Operations; Transporting 25 Expired
US8268645B2 Method and apparatus for forming a thin lamina Emerging Cross-Sectional Technologies 17 Active
US6992370B1 Memory cell structure having nitride layer with reduced charge loss and method for fabricating same Electricity 1 Expired
US12336321B2 Photovoltaic devices with textured TCO layers, and methods of making TCO stacks Emerging Cross-Sectional Technologies 0 Active
US8435804B2 Method and apparatus for forming a thin lamina Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.