Polarization-modulating optical element

US8270077B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Damian Fiolka · Oberkochen, DE
• Markus Deguenther · Aalen, DE

Key dates

• Filing date: May 25, 2006
• Grant date: Sep 18, 2012
• Expiry date: May 25, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B7/008
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical arrangement includes a polarization-modulating optical element and a compensation plate is disclosed. The polarization-modulating optical element includes a first optically active material having a first specific rotation with a sign, the polarization-modulating optical element having a first optical axis. The polarization-modulating element has a first thickness profile that, as measured in the direction of the first optical axis, that is variable. The compensation plate includes a second optically active material having a second specific rotation with a sign opposite the sign of the first specific rotation. The compensation plate has a second thickness profile configured so that, when radiation passes through the optical arrangement, the compensation plate substantially compensates for angle deviations of the radiation that are caused by the polarization-modulating optical element.