Automated model building and model updating

US8271103B2 · kind B2 · utility

Assignee

• MKS Instruments, Inc. · US

Inventors

• Lawrence Hendler · Cupertino, US
• Stela Diamant Lazarovich · Herzliya, IL
• Ron Hadar · Cupertino, US
• Nouna Kettaneh · Hollis, US
• Uzi Levami · Hod HaSharon, IL
• Dmitry Perlroizen · Rehovot, IL

Key dates

• Filing date: May 1, 2008
• Grant date: Sep 18, 2012
• Expiry date: Jul 20, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B2219/45031
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.