Triaxial acceleration sensor

US8272268B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Johannes Classen · Reutlingen, DE
• Arnd Kaelberer · Neckargemünd, DE
• Lars Tebje · Reutlingen, DE

Key dates

• Filing date: Aug 19, 2009
• Grant date: Sep 25, 2012
• Expiry date: Jan 1, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0831
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.