Reduced capacity carrier, transport, load port, buffer system
US8272827B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Aug 13, 2007 |
| Grant date | Sep 25, 2012 |
| Priority date | — |
| Expiry date | Apr 4, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.