Tomographic atom probe comprising an electro-optical generator of high-voltage electrical pulses
US8276210B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 13, 2009 |
| Grant date | Sep 25, 2012 |
| Priority date | — |
| Expiry date | Oct 13, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03K3/537
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic atom probe comprises a high-voltage generator connected to an electrode by an electrical connection comprising a chip of semiconductor material. The probe also comprises a light source which can be controlled in order to generate light pulses which are applied to the semiconductor chip. Throughout the illumination, the chip is rendered conductive, which puts the high-voltage generator and the electrode in electrical contact so that a potential step is applied to the latter. The probe also comprises means for applying a voltage step of opposite amplitude to the previous step at the end of a time interval Δt0, so that the electrode finally receives a voltage pulse of duration Δt0.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.