Surface texture measuring instrument and measuring method
US8276435B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 28, 2009 |
| Grant date | Oct 2, 2012 |
| Priority date | — |
| Expiry date | Mar 27, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B5/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface texture measuring instrument includes: a measuring device that includes a detector for detecting surface texture of a workpiece and an X-axis movement mechanism for moving the detector in a measurement direction; an elevation inclination adjuster capable of adjusting an elevation position and an inclination angle of a table on which the measuring device is mounted; a stage on which the workpiece is mounted; and a controller that controls the measuring device and the elevation inclination adjuster. The controller includes: a measurement controller that controls the X-axis movement mechanism to conduct a preliminary measurement and main measurement of the workpiece; a computing unit that acquires a result of the preliminary measurement from the detector and obtains an inclination angle of the workpiece at which the workpiece is inclined to the measurement direction; and a positioning controller for adjusting the inclination angle of the table based on the obtained inclination angle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.