Positioning device for a particle beam apparatus

US8283641B2 · kind B2 · utility

Assignee

• Carl Zeiss NTS GmbH · US

Inventors

• Dietmar Dönitz · Aalen, DE
• Dirk Preixszas · Oberkochen, DE
• Michael Steigerwald · Aalen, DE

Key dates

• Filing date: May 14, 2009
• Grant date: Oct 9, 2012
• Expiry date: Jan 18, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2817
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A positioning device and a particle beam apparatus including a positioning device ensure reliable positioning of a holder for holding an object at any working distance. The positioning device includes a positionable holder for holding the object. A light source generates a light beam which is guided in the direction of the positionable holder. A detector detects the light beam. An injection area injects particles of a particle beam such that they are guided in the direction of the positionable holder. The light beam passes the injection area. The injection area has an output side for the light beam and the particle beam, which is directed toward the holder. The detector includes a detector element situated in an area between the output side and the holder. The light source includes a light source element situated in an area which extends away from the holder, starting from the output side.