Resonator electrode shields
US8283987B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2010 |
| Grant date | Oct 9, 2012 |
| Priority date | — |
| Expiry date | Oct 4, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/2442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.