Patent · US Active

Microshells with integrated getter layer

US8288835B2 · kind B2 · utility

25Cited by

38References

26Claims

0Family size

Assignee

Silicon Laboratories Inc. · US

Inventors

Emmanuel P. Quevy · Corona, US
Pezhman Monadgemi · Fremont, US
Roger T. Howe · Lafayette, US

Key dates

Filing date	Jan 31, 2011
Grant date	Oct 16, 2012
Priority date	—
Expiry date	Jan 31, 2031

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0771
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Microshells including a perforated pre-sealing layer and an integrated getter layer are provided. The integrated getter layer may be disposed between other layers of a perforated pre-sealing layer. The perforated pre-sealing layer may include at least one perforation, and a sealing layer may be provided on the pre-sealing layer to close the perforation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.