Patent · US Active

Handle wafer having viewing windows

US8288841B2 · kind B2 · utility

0Cited by

10References

9Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Jean-Charles Souriau · Pessac, FR
Stéphane Caplet · Saint-Égrève, FR

Key dates

Filing date	Jun 30, 2010
Grant date	Oct 16, 2012
Priority date	—
Expiry date	Oct 30, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/3025
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A handle wafer for microelectronic functional wafers, including at least one cavity through the thickness of the wafer, this cavity including a viewing window in solid or solidified material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.