Magnetoresistive sensor and manufacturing method thereof
US8289021B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2010 |
| Grant date | Oct 16, 2012 |
| Priority date | — |
| Expiry date | Mar 28, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/096
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.