Polarization-modulating optical element

US8289623B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Damian Fiolka · Oberkochen, DE
• Markus Deguenther · Aalen, DE

Key dates

• Filing date: Mar 23, 2010
• Grant date: Oct 16, 2012
• Expiry date: Mar 23, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F1/0147
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A polarization-modulating optical element consisting of an optically active crystal material has a thickness profile where the thickness, as measured in the direction of the optical axis, varies over the area of the optical element. The polarization-modulating optical element has the effect that the plane of oscillation of a first linearly polarized light ray and the plane of oscillation of a second linearly polarized light ray are rotated, respectively, by a first angle of rotation and a second angle of rotation, with the first angle of rotation and the second angle of rotation being different from each other.