Yttria-coated ceramic components of semiconductor material processing apparatuses and methods of manufacturing the components
US8293335B2 · kind B2 · utility
5Cited by
6References
12Claims
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Key dates
| Filing date | Mar 8, 2007 |
| Grant date | Oct 23, 2012 |
| Priority date | — |
| Expiry date | Sep 4, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32477
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Yttria-coated ceramic components of semiconductor material processing apparatuses include a substrate and at least one yttria-containing coating on the substrate. The components are made by applying a first yttria-containing coating on a ceramic substrate, which can be a green body of the ceramic material. The coated green body is sintered. The first yttria-containing coating can be treated to remove attached yttria particles resulting from the sintering. In another embodiment, a second yttria-containing coating can be thermally sprayed on the first yttria-containing coating to cover the particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.