Multilayer antireflection coatings, structures and devices including the same and methods of making the same
US8294139B2 · kind B2 · utility
45Cited by
46References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2007 |
| Grant date | Oct 23, 2012 |
| Priority date | — |
| Expiry date | May 6, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24174
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Multi-layer antireflection coatings, devices including multi-layer antireflection coatings and methods of forming the same are disclosed. A block copolymer is applied to a substrate and self-assembled into parallel lamellae above a substrate. The block copolymer may optionally be allowed to self-assemble into a multitude of domains oriented either substantially parallel or substantially perpendicular to an underlying substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.