Patent · US Active

Shielding for high-voltage semiconductor-on-insulator devices

US8299561B2 · kind B2 · utility

2Cited by
5References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 21, 2010
Grant dateOct 30, 2012
Priority date
Expiry dateOct 13, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/8503
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Integrated circuits having doped bands in a substrate and beneath high-voltage semiconductor-on-insulator (SOI) devices are provided. In one embodiment, the invention provides an integrated circuit comprising: a semiconductor-on-insulator (SOI) wafer including: a substrate; a buried oxide (BOX) layer atop the substrate; and a semiconductor layer atop the BOX layer; a plurality of high voltage (HV) devices connected in series within the semiconductor layer; a doped band within the substrate and below a first of the plurality of HV devices; and a contact extending from the semiconductor layer and through the BOX layer to the doped band.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.