System and method for safeguarding wafers and photomasks
US8299926B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 14, 2009 |
| Grant date | Oct 30, 2012 |
| Priority date | — |
| Expiry date | Jan 9, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG08B13/1481
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A system and a method for safeguarding wafers and photomasks. The system includes a container for storing an article, the article being a wafer or a photomask; a flashing unit for flashing light with a pre-determined light pattern; an anti-theft unit capable of performing an anti-theft function, the anti-theft unit being attached to the container; and a trigger unit electrically connected to the anti-theft unit for triggering the anti-theft function of the anti-theft unit, in response to detecting the pre-determined light pattern of the flashing unit. The method includes providing a container having an anti-theft unit capable of performing an anti-theft function; storing an article in the container, the article being a wafer or a photomask; providing a flashing light with a pre-determined light pattern; detecting the pre-determined light pattern; and performing the anti-theft function by the anti-theft unit, in response to detecting the pre-determined light pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.