Enhanced ultra-high resolution acoustic microscope
US8302480B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 5, 2008 |
| Grant date | Nov 6, 2012 |
| Priority date | — |
| Expiry date | Feb 6, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K15/046
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical-acoustic transducer structure includes at least one metal or semiconducting film in which a part of a pump light pulse is absorbed to generate a sound pulse; and at least one dielectric film. The thicknesses and optical properties of the at least one metal or semiconducting film and the at least one dielectric film are selected so that a returning sound pulse results in a measurable change in the optical reflectivity and/or some other optical characteristic of the transducer structure. The transducer structure includes a resonant cavity, and an output surface that is shaped so as to provide no significant focusing of generated sound waves when the sound waves are launched towards a surface of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.