Closed drift ion source
US8304744B2 · kind B2 · utility
2Cited by
16References
39Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 19, 2007 |
| Grant date | Nov 6, 2012 |
| Priority date | — |
| Expiry date | May 6, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3146
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A closed drift ion source is provided, having an anode that serves as both the center magnetic pole and as the electrical anode. The anode has an insulating material cap that produces a closed drift region to further increase the electrical impedance of the source. The ion source can be configured as a round, conventional ion source for space thruster applications or as a long, linear ion source for uniformly treating large area substrates. A particularly useful implementation uses the present invention as an anode for a magnetron sputter process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.