Patent · US Active

Scanning charged particle beams

US8304750B2 · kind B2 · utility

50Cited by

5References

30Claims

0Family size

Assignee

Carl Zeiss NTS GmbH · US

Inventors

Dirk Preikszas · Oberkochen, DE
Michael Steigerwald · Aalen, DE
Joerg Ackermann · Crimmitschau, DE

Key dates

Filing date	Dec 12, 2008
Grant date	Nov 6, 2012
Priority date	—
Expiry date	Jul 22, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/30488
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Methods are disclosed that include exposing, in direct succession, portions of a surface of a sample to a charged particle beam, the portions of the surface of the sample forming a row in a first direction, the charged particle beam having an average spot size f at the surface of the sample, each portion being spaced from its neighboring portions by a distance of at least d in the first direction, and a ratio d/f being 2 or more.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.