Patent · US Active

Connecting arrangement for an optical device

US8305701B2 · kind B2 · utility

1Cited by

7References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Heiko Methe · Boston, US
Willi Heintel · Aalen, DE
Sascha Licht

Key dates

Filing date	Sep 17, 2009
Grant date	Nov 6, 2012
Priority date	—
Expiry date	Mar 31, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70891
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The disclosure relates to a connecting arrangement for an optical device, such as in microlithography. The connecting arrangement includes a first body, a second body and a connecting device. The first body contacts the second body in a laminar manner in a contact region. The connecting device is connected to the second body and contacts the first body via at least one contact unit. The connecting device is configured to generate a predefinable contact force in the contact region between the first body and the second body. The contact unit includes a plurality of separate contact elements. Each contact element is connected to the second body via a spring unit which can be elastically deformed to generate a contribution to the contact force.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.