Inventor · Aalen, DE

Willi Heintel

9Patents
2h-index
30Co-inventors
47Inventor score

Filing activity: Dec 3, 2003 → Dec 29, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US9134501B2 Optical element unit and method of supporting an optical element Physics 5 Active
US7760327B2 Reflecting optical element with eccentric optical passageway Physics 3 Active
US7859641B2 Optical element module Physics 2 Active
US7448763B2 Optical subassembly and projection objective in semiconductor lithography Physics 2 Expired
US8305701B2 Connecting arrangement for an optical device Physics 1 Active
US8441747B2 Optical module with minimized overrun of the optical element Physics 1 Active
US9658542B2 Optical element Physics 0 Active
US10133183B2 Optical component Physics 0 Active
US10663873B2 Mirror arrangement for microlithographic projection exposure apparatus and related method Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.