Semiconductor memory device and method of manufacturing same
US8309958B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2010 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Mar 5, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B63/20
Abstract
According to one embodiment, a semiconductor memory device includes a word line interconnection layer, a bit line interconnection layer and a pillar. The word line interconnection layer includes a plurality of word lines which extend in a first direction. The bit line interconnection layer includes a plurality of bit lines which extend in a second direction crossing over the first direction. The pillar is arranged between each of the word lines and each of the bit lines. The pillar includes a silicon diode and a variable resistance film, and the silicon diode includes a p-type portion and an n-type portion. The word line interconnection layer and the bit line interconnection layer are alternately stacked, and a compressive force is applied to the silicon diode in a direction in which the p-type portion and the n-type portion become closer to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.