LCoS cell strucutre
US8310646B2 · kind B2 · utility
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19Claims
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Key dates
| Filing date | Nov 16, 2009 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Mar 7, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1339
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A liquid crystal on silicon (LCoS) cell structure includes a substrate, a plurality of top metal regions arranged in an array, a dielectric material filling between the top metal regions and a composite post spacer disposed on the dielectric material and encircling to form a cell space. The composite post spacer includes a first dielectric layer disposed on the dielectric material and a spacer material layer disposed on the first dielectric layer. The spacer material layer and the first dielectric layer are substantially different.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.