Patent · US Active

Variable overlap method and device for stitching together lithographic stripes

US8312393B2 · kind B2 · utility

2Cited by

4References

12Claims

0Family size

Assignee

Micronic Laser Systems AB · SE

Inventors

Sten Lindau · Täby, SE
Torbjorn Sandstrom · Mölnlycke, SE
Anders Osterberg · Täby, SE
Lars Ivansen · Solna, SE

Key dates

Filing date	Mar 5, 2010
Grant date	Nov 13, 2012
Priority date	—
Expiry date	Jan 29, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70783
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The technology disclosed relates to variable tapers to resolve varying overlaps between adjacent strips that are lithographically printed. Technology disclosed combines an aperture taper function with the variable overlap taper function to transform data and compensate for varying overlaps. The variable taper function varies according to overlap variation, including variation resulting from workpiece distortions, rotor arm position, or which rotor arm printed the last stripe. Particular aspects of the present invention are described in the claims, specification and drawings.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.