Patent · US Active

Semiconductor manufacturing process modules

US8313277B2 · kind B2 · utility

14Cited by
56References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 23, 2007
Grant dateNov 20, 2012
Priority date—
Expiry dateJan 21, 2029

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S414/139
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A variety of process modules are described for use in semiconductor manufacturing processes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.