Multi-channel radio frequency generator
US8314561B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 15, 2010 |
| Grant date | Nov 20, 2012 |
| Priority date | — |
| Expiry date | May 30, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F3/68
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A multi-channel radio frequency (RF) generator module includes N power amplifiers, M drivers, a power supply module, and a control module. The N power amplifiers generate N RF outputs, respectively. The M drivers drive the N power amplifiers based on M driver control signals, respectively. The power supply module receives alternating current (AC) input power and applies L rail voltages to the N power amplifiers based on L rail voltage setpoints, respectively. The control module sets the L rail voltage setpoints and the M driver control signals. N is an integer greater than one, L and M are integers greater than zero, and M and L are less than or equal to N.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.