Substrate processing apparatus, display method, storage medium, and program
US8314776B2 · kind B2 · utility
0Cited by
7References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 15, 2007 |
| Grant date | Nov 20, 2012 |
| Priority date | — |
| Expiry date | Mar 27, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67276
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
[Problems] A highly convenient maintenance screen needs to be displayed on a display panel when performing a maintenance while considering a correlation between a plurality of processing chambers. [Means for Solving the Problems] Since task buttons are displayed on a second display region 312 by arranging them from the left in an order of a time sequence in which each task button has been clicked, a highly convenient maintenance screen can be displayed on a touch panel 300 when performing a maintenance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.