System and method for probe mark analysis
US8319978B2 · kind B2 · utility
4Cited by
5References
40Claims
0Family size
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Key dates
| Filing date | Jul 10, 2007 |
| Grant date | Nov 27, 2012 |
| Priority date | — |
| Expiry date | Jan 26, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/008
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for analyzing probe mark, the method includes: scanning the probe mark by multiple spots; evaluating a probe mark characteristic in response to detection signals generated by multiple sensors of the chromatic confocal system that is characterized by a sub-micron axial resolution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.