Electret condenser
US8320589B2 · kind B2 · utility
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22References
26Claims
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Assignee
Inventors
Key dates
| Filing date | Nov 4, 2010 |
| Grant date | Nov 27, 2012 |
| Priority date | — |
| Expiry date | Jun 30, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/112
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An electret condenser includes a fixed film 110 including a conductive film 118 to be an upper electrode, a vibrating film 112 including a lower electrode 104 and a silicon oxide film 105 to be an electret film, and a silicon oxide film 108 provided between the fixed film 110 and the vibrating film 112 and including an air gap 109. Respective parts of the fixed film 110 and the vibrating film 112 exposed in the air gap 109 are formed of silicon nitride films 106 and 114.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.