Patent · US Active

Substrate support, substrate processing device and method of placing a substrate

US8323412B2 · kind B2 · utility

0Cited by

6References

11Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Dieter Haas · Bruchköbel, DE
Thomas R. Berger · Racine, US
Simon Lau · Alzenau, DE

Key dates

Filing date	Apr 23, 2008
Grant date	Dec 4, 2012
Priority date	—
Expiry date	Oct 5, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49998
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A substrate support for supporting a substrate in a processing chamber comprises a frame for carrying the substrate, at least a first fastening means fixedly attached to the frame for aligning the substrate relative to the frame, and at least a second fastening means movably attached to the frame, the second fastening means being movable relative to the frame and/or the substrate. Furthermore, a processing device comprises an edge exclusion projecting over a portion of the surface of the substrate in order to prevent processing of the portion of the surface of the substrate. A part of the edge exclusion may be moved into a gap between the edge(s) of the substrate and the frame element of the substrate support to form a labyrinth seal between the frame element and the edge of the substrate. A method of placing the substrate on the substrate support is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.