Aberration-correcting dark-field electron microscopy
US8324574B2 · kind B2 · utility
7Cited by
11References
20Claims
0Family size
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Key dates
| Filing date | Feb 10, 2011 |
| Grant date | Dec 4, 2012 |
| Priority date | — |
| Expiry date | Feb 10, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/262
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the electron beam for at least a spherical aberration. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope operates in a dark-field mode in which a zero beam of the electron beam is not detected. The microscope may also be capable of operating in an incoherent illumination mode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.