Method of analyzing an integrated circuit, method of observation and their associated installations
US8326558B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2007 |
| Grant date | Dec 4, 2012 |
| Priority date | — |
| Expiry date | Aug 16, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a method for analyzing an integrated circuit, including a step for applying laser radiation at a point on the surface of the circuit, a step for exciting the circuit thus subjected to laser radiation by applying an electrical excitation signal, a step for collecting the response of the circuit to the excitation, the circuit being subjected to laser radiation, and a step for measuring the phase difference between the response to the excitation of the circuit subjected to laser radiation and a reference response of the circuit in the absence of laser radiation applied to the circuit. The invention also relates to an associated observation method and installation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.