Acceleration sensor and method for its manufacture

US8336382B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Johannes Classen · Reutlingen, DE
• Arnd Kaelberer · Neckargemünd, DE
• Patrick Wellner · Neckartenzlingen, DE
• Dietrich Schubert · Reutlingen, DE
• Lars Tebje · Reutlingen, DE

Key dates

• Filing date: Nov 2, 2009
• Grant date: Dec 25, 2012
• Expiry date: Feb 9, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49124
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor is described that has a base substrate, a first electrode structure situated in stationary fashion relative to the base substrate, a sensor element having a first electrode area, and a spring device having at least one spring element. Via the spring element, the sensor element is coupled to the base substrate so that the sensor element is deflected relative to the base substrate as the result of an acceleration acting on the sensor element, thus changing the distance between the first electrode structure and the first electrode area. The sensor element and the first electrode structure are situated at least partially one over the other and are formed from a common functional layer.