Patent · US Active

Temperature-control device for an optical assembly

US8339569B2 · kind B2 · utility

1Cited by

6References

15Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Armin Schoeppach · Aalen, DE
Timo Laufer · Stuttgart, DE

Key dates

Filing date	Mar 16, 2011
Grant date	Dec 25, 2012
Priority date	—
Expiry date	Aug 11, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70891
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A temperature-control device is used for controlling the temperature of an optical assembly with at least one optical body, the temperature of which is to be controlled, with at least one optical surface which can be acted upon by a heat flow. The temperature-control device has a heat sink to receive a heat flow, which is emitted by the optical body or a transmission body which is in thermal connection with the optical body. The heat sink is arranged adjacent to a peripheral region of the optical surface. The temperature-control device has a heating mechanism with at least one heating body, which is arranged adjacent to the optical body. The heating body is connected via a physical heat bridge to the heat sink.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.