Electrode of an integrated circuit

US8344438B2 · kind B2 · utility

Assignee

• Qimonda AG · DE

Inventors

• Uwe Schroeder · Fishkill, US
• Stefan Jakschik · Kessel-Lo, BE
• Johannes Heitmann · Dresden, DE
• Tim Boescke · Dresden, DE
• Annette Saenger · Dresden, DE

Key dates

• Filing date: Jan 31, 2008
• Grant date: Jan 1, 2013
• Expiry date: Jul 30, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/694

Abstract

The present invention refers to an electrode comprising a first metallic layer and a compound comprising at least one of a nitride, oxide, and oxynitride of a second metallic material.