Integrated circuit inductor with integrated vias
US8344479B2 · kind B2 · utility
5Cited by
24References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2011 |
| Grant date | Jan 1, 2013 |
| Priority date | — |
| Expiry date | Feb 15, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Integrated circuit inductors (5) are formed by interconnecting various metal layers (10) in an integrated circuit with continuous vias (200). Using continuous vias (200) improves the Q factor over existing methods for high frequency applications. The contiguous length of the continuous vias should be greater than three percent of the length of the inductor (5).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.