Patent · US Active

Optical inspection system and method

US8345232B2 · kind B2 · utility

0Cited by

24References

17Claims

0Family size

Assignee

Nanda Technologies GmbH · DE

Inventors

Lars Markwort · Haimhausen, DE
Rajeshwar Chhibber · San Jose, US
Klaus Eckerl · Hutthurm, DE
Norbert Harendt · Hutthurm, DE

Key dates

Filing date	Oct 29, 2010
Grant date	Jan 1, 2013
Priority date	—
Expiry date	Nov 12, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/12
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An inspection system includes imaging optics for imaging an object plane into an image plane. The imaging optics include an objective lens having positive optical power, a first lens group having negative optical power, and a second lens group having positive optical power. The optical elements are arranged along a common unfolded optical axis with a pupil plane of the imaging optics located between the first lens group and the second lens group.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.