Inventor · Haimhausen, DE

Lars Markwort

17Patents
5h-index
19Co-inventors
59Inventor score

Filing activity: Dec 19, 2001 → Apr 13, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US7557360B2 Ion sources, systems and methods Electricity 63 Active
US7485873B2 Ion sources, systems and methods Electricity 22 Active
US8110814B2 Ion sources, systems and methods Electricity 20 Active
US7488952B2 Ion sources, systems and methods Electricity 15 Active
US7064828B1 Pulsed spectroscopy with spatially variable polarization modulation element Physics 14 Expired
US8072591B2 Optical inspection system and method Electricity 5 Active
US8102521B2 Optical inspection system and method Electricity 4 Active
US8748845B2 Ion sources, systems and methods Electricity 2 Active
US9236225B2 Ion sources, systems and methods Electricity 1 Active
US9355919B2 Methods and systems for inspecting bonded wafers Physics 1 Active
US9012867B2 Ion sources, systems and methods Electricity 1 Active
US8460946B2 Methods of processing and inspecting semiconductor substrates Physics 1 Active
US8368881B2 Optical inspection system and method Electricity 0 Active
US8501503B2 Methods of inspecting and manufacturing semiconductor wafers Physics 0 Active
US8778702B2 Method of inspecting and processing semiconductor wafers Electricity 0 Active
US8345232B2 Optical inspection system and method Electricity 0 Active
US9182357B2 Semiconductor wafer inspection system and method Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.