Patent · US Active

Cavity closure process for at least one microelectronic device

US8349660B2 · kind B2 · utility

3Cited by

2References

19Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Gilles Delapierre · Seyssinet-Pariset, FR
Bernard Diem · Échirolles, FR
Francois Perruchot · Issy-les-Moulineaux, FR

Key dates

Filing date	Jan 26, 2010
Grant date	Jan 8, 2013
Priority date	—
Expiry date	Jul 16, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A process for closure of at least one cavity intended to encapsulate or be part of a microelectronic device, comprising the following steps:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.