Method and optical assembly for analysing a sample
US8350230B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 18, 2008 |
| Grant date | Jan 8, 2013 |
| Priority date | — |
| Expiry date | Jan 27, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and an arrangement for analyzing a specimen, wherein the specimen is supported so as to be rotatable around an axis of rotation and displaceable in all three spatial directions and is illuminated by a first illumination device. Light radiated from the specimen is imaged on a detection device. A plurality of sectional images of the specimen are recorded at different settings of the rotational angle, and the specimen is rotated. The recorded sectional images are fused to form a data set of spatial image data of the specimen. The specimen is then illuminated by a second illumination device perpendicular to the axis of rotation, wherein a plurality of shadow images of the specimen are recorded and the specimen is rotated. A second data set of spatial image data of the specimen is constructed from the recorded shadow images by means of a back projection algorithm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.