Linear-carrier phase-mask interferometer
US8351048B2 · kind B2 · utility
14Cited by
3References
8Claims
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Key dates
| Filing date | Aug 16, 2010 |
| Grant date | Jan 8, 2013 |
| Priority date | — |
| Expiry date | May 24, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Mireau and Fizeau polarization interferometric objectives are implemented with a thin conductive wire grid optically coupled to the objective beam splitter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.